Tender detail
Purchase of a DRIE/RIE plasma etching system
Summary
The tender concerns the purchase of a new DRIE/RIE plasma etching system, including software, system control, installation, commissioning and training. The bidder must also supply all necessary accessories and components so that the system can operate as required for research use. The notice also sets out several technical compliance requirements for the equipment, such as wafer sizes, gases, cooling, cleanroom suitability, CE conformity and dimensions.
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