Supply, installation and commissioning of a suite of plasma etcher and plasma deposition tools, 4 lots

Summary

The tender concerns the supply, installation and commissioning of a suite of plasma etcher and plasma deposition tools in 4 lots for University College Cork. The equipment will be used for silicon-based and dielectric materials and must be suitable for 100 mm and 200 mm diameter wafers. Bidders should be prepared to submit proposals for one or more lots and should check the tender documents for the exact qualification and compliance requirements.