Tender detail
Upgrade of a 200 mm Tungsten CVD Chamber to WxZ Sprint Configuration
Summary
The tender concerns the upgrade of an existing 200 mm tungsten CVD system to a WxZ Sprint configuration. The work includes adapting the gas distribution system, integrating additional hardware to enable deposition pressures of up to 300 Torr, and planning, supplying, integrating, commissioning and qualifying the required hardware and software modifications to the existing equipment system.
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